The effect of coil design on materials synthesis in an inductively coupled plasma torch

摘要

A mathematical model for the analysis and design of inductively coupled plasma torches is presented. The model is based upon a solution of the electromagnetic vector potential equation and is capable of predicting the two‐dimensional velocity, temperature, and electromagnetic fields as well as the reaction kinetics inside the torch for any axisymmetric coil configuration. The model is used to study the effect of coil design on the thermal decomposition of silicon tetrachloride to silicon. The coil design is found to affect both the temperature field and the flow field and to have a significant effect on the reaction kinetics in the torch. It is demonstrated that through fundamental changes in the coil design it is possible to control the location of the reaction zone and to reduce silicon deposition on the wall of the reactor.