Doping solely during periods when growth was suspended has been used to synthesize profiles not easily achieved by conventional doping techniques. Suspension of growth under arsenic stabilized conditions allows Ge doping to producen‐type complex profiles with reduced autocompensation. At higher temperatures, autocompensation becomes apparent. Under gallium stabilized conditions, heavily autocompensatedn‐type layers resulted, consistent with a nonunity incorporation coefficient.
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机译:仅在生长暂停期间使用兴奋剂已被用于合成传统兴奋剂技术不容易实现的曲线。在砷稳定条件下暂停生长允许 Ge 掺杂产生具有降低自补偿的 &连字符型复合曲线。在较高温度下,自动补偿变得明显。在镓稳定条件下,产生了高度自补偿的连字符型层,与非单位掺入系数一致。
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