Graphical peak analysis method for determining densities and emission rates of traps in dielectric film from transient discharge current

摘要

The purpose of this study is to propose and test the graphical peak analysis method discharge current transient spectroscopy (DCTS) for determining the densities and emission rates of traps in a dielectric thin film from the transient discharge current I_(dis)(t) in a capacitor at a constant temperature, different from thermally stimulated current (TSC). It is theoretically demonstrated that DCTS can distinguish among traps with close emission rates. Experimentally, the densities and emission rates of five traps in Pb(Zr, Ti)O_(3) thin films are determined using DCTS. Here, these five emission rates are between 1×10~(-3) s~(-1) and 7×10~(-2) s~(-1). One kind of trap, which was determined by TSC under the assumption of one emission rate, is found to be distinguished into five kinds of traps with close emission rates by DCTS.