We have developed a reflection optical second harmonic (SH) microscope as a new surface probe. Using the combination of the developed SH microscope, a near infrared microscope, a confocal laser microscope, a Raman microprobe spectrometer, and an electron probe microanalyzer for x-ray fluorescence, we have observed microstructures on cleaved GaAs(110) surfaces. We have demonstrated that slab structures on these surfaces are unambiguously identified by the analysis using a combination of these microscopes. We have found that the reflection SH microscope is especially sensitive to the slab structures. The enhancement of second harmonic generation by the slab structure could be well accounted for by an electromagnetic calculation of the SH intensity.
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