机译:The use of the grey-Taguchi method for the optimization of a silicon nanowires array synthesized using electroless Ag-assisted etching
Department of Mechanical Engineering, National Chiao Tung University, Hsinchu, Taiwan;
National Nano Device Laboratories, Hsinchu, Taiwan;
Department of Mechanical Engineering, Hwa Hsia Institute of Technology, Taipei 23568, TaiwanDepartment of Mechanical Engineering, Lunghwa University of Science and Technology, Guishan, Taiwan;
Electroless Ag-assisted etching; Grey-Taguchi method; Silicon nanowires arrays;