A structure marker study for Pd2Si formation: Pd moves in epitaxial Pd2Si

摘要

A sample with the configuration Si (111)/single crystalline Pd2Si/polycrystalline Pd2Si/Pd is used to study the dominant moving species during subsequent Pd2Si formation by annealing at 275thinsp;deg;C. The interface between monocrystalline and polycrystalline Pd2Si is used as a marker to monitor the dominant moving species. The result shows that Pd is the dominant moving species in the monocrystal. off