The formation of a Ag-stabilized regular step lattice on vicinal Si(111) miscut towards 112 is reported. The step bunching characteristic of the clean surface is prevented by single-domain Si(111)-(3×1)-Ag reconstruction. The nanostructured surface is used as a template for growing one-dimensional arrays of 1 nm sized Ag quantum dots with a preferential spacing of 1.5 nm along the rows.
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