The change in surface composition and structure of a rutile TiO_(2)(110) surface during thermal annealing in an ultrahigh vacuum was studied by coaxial impact-collision ion scattering spectroscopy and time-of-flight elastic recoil detection analysis. When the clean TiO_(2)(110) surface with a 1×1 bridging-oxygen-rows structure was obtained by annealing at 730℃, about one monolayer of hydrogen atoms still resided on the surface. These hydrogen atoms were assigned to surface hydroxyls as an ingredient of the TiO_(2)(110) 1×1 structure, which was formed in the self-restoration process of surface oxygen vacancy defects by dissociative adsorption of water molecules during thermal annealing.
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