A thermodynamical calculation of the transport rate of AlSb in a closed-tube vapor-phase growth system

摘要

The transport rate of AlSb in a closed-tube vapor-phase growth system with iodine as a transport agent was calculated thermodynamically. The calculated maximum transport rate was obtained at an I2density of about 0.004 mg cm-3in the growth-temperature system of 550-600 degrees C. The calculation was compared with the experimental results for AlxGa1-xSb. The calculated I2density that gave the maximum transport rate in the AlSb-growth system qualitatively agreed with the experimental results in the AlxGa1-xSb-growth system.