Phase formation and dissociation in the thinhyphen;film Pt/Al system

摘要

Phase formation has been investigated in the following thinhyphen;film systems: Al/Pt, Pt2Al/Al, Pt8Al21/Pt, Pt/PtAl, and Pt/Pt5Al21/Al, between 225 and 550thinsp;deg;C. The films were prepared by sequential evaporation and coevaporation, annealed under vacuum, and analyzed by Rutherford backscattering and xhyphen;ray diffraction. In all cases, except for Pt/PtAl, the initial phase formed was Pt2Al3, followed by the more Pthyphen; or Alhyphen;rich phases, depending on the overall stoichiometry. Al is the dominant moving species during the formation of Pt2Al3.