机译:溅射沉积非晶LiCuPO4薄膜作为锂离子微电池正极材料
Aix Marseille Univ, CNRS, UMR 7246, Dept Chem,MADIREL Lab, F-13397 Marseille, France;
IMT Mines St Etienne, Ctr Microelect Provence, Dept Flexible Elect, F-13541 Gardanne, France;
amorphous materials; LiCuPO4; Li-ion microbatteries; radio frequency sputtering; thin films; BATTERY; OXIDE; COMPOSITE; CATION;