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首页> 外文期刊>Applied physics letters >Interface formation and defect structures in epitaxial La_(2)Zr_(2)O_(7) thin films on (111) Si
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Interface formation and defect structures in epitaxial La_(2)Zr_(2)O_(7) thin films on (111) Si

机译:Interface formation and defect structures in epitaxial La_(2)Zr_(2)O_(7) thin films on (111) Si

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摘要

We have studied the growth of epitaxial La_(2)Zr_(2)O_(7) thin films on (111) Si. Although the interface structure can be strongly affected by the Si oxidation during the deposition process, epitaxial growth of La_(2)Zr_(2)O_(7) was obtained. A detailed study by means of transmission electron microscopy reveals two types of structures (pyrochlore and fluorite) with the same average chemical composition but strong differences in reactivity and interface formation. The structural complexity of the ordered pyrochlore structure seems to prevent excess oxygen diffusion and interfacial SiO_(2) formation.

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