Calibration of Sub-10-nm Flying Height Using the Bump Response

摘要

This paper presents a study on the calibration of sub-10-nm fly height of slider by detecting slider response to laser bump with known height. The PZT sensor signal was applied to identify the slider air bearing resonance and slider body resonance. By comparing the signals from these two sources, improper measurement results due to the uncertainty of slider-bump response process can be eliminated. The time-frequency analysis of laser Doppler vibrometer measured slider bump responses also correlates the results.