A model based on classical physics describing the nonlinear dynamics of a microscale spatial light modulator has been developed. The coupled electromechanical equations of motion have been solved for steadyhyphen;state, transient, and harmonic excitation. Comparison of theoretical predictions with the results of experiment for representative devices shows good agreement for smallhyphen;amplitude deflections, largehyphen;amplitude deflections, and unstable transitions.
展开▼