A small size dual band microstrip patch antenna with small ground plane has been fabricated using MEMS. Multiple layer substrates are used to realize small size and broadband characteristics. For broad dual band characteristics, the microstrip patch is divided into four pieces and each patch is connected to each other using LC resonators. The fabrication process is simple and only one mask is needed. The size of microstip antenna is 8*12*2 mm{sup}3. The experimental results show that lower band has the bandwidth of 310 MHz at 5.28 GHz and upper band has the bandwidth of 640 MHz at 6.88 GHz.
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