机译:Maskless texturization of phosphorus-diffused layers for crystalline Si solar cells by plasmaless dry etching with chlorine trifluoride gas
Department of Electrical and Mechanical Engineering, Seikei University, 3-3-1 Kichijoji-Kitamachi, Musashino, Tokyo 180-8633, Japan;
Diffused layer; Dry etching; Reflectance; Sheet resistance; Texturing;