机译:Electroless deposition of Ag nanoparticles on the surface of SiN _x:H dielectric layers
Institut Chimie et Matriaux Paris Est (ICMPE), CNRS-UMR-7182, 2-8 rue Henri Dunant, 94320 Thiais, France;
Universit de Lyon, Institute for Nanotechnologies of Lyon (INL), INSA de Lyon, 7 Avenue Jean Capelle, Villeurbanne, F-69621, France;
Electroless metal deposition; Hydrogenated silicon nitride; Metal nanoparticles; Silicon nanoparticles;