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SAW propagation loss mechanism in piezoelectric ceramics

机译:压电陶瓷中的SAW传播损耗机理

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The surface acoustic wave (SAW) propagation loss mechanism of piezoelectric ceramics is examined using lead titanate (PbTiO3) ceramics modified with additives of Nd2O3, MnO2, and In2O3, which have zero temperature coefficients of SAW delay time. The propagation lossLin the frequency range 30 to 300 MHz consists of two parts. One is the Rayleigh scattering lossLScaused by grain, and the other is the true dissipative lossLFcaused by internal friction. Thus, total loss results inL(dB/cm) =LS+LF= 3.2×103D3f4+6.8×10−4f2(whereDandfdenote average grain size in cm and frequency in MHz, respectively). It is also revealed experimentally that the internal friction causing the latter loss has a close correlation with the dielectric loss through piezoelectric combination. Therefore, materials with fine grain (<0.5 mgr;m) and low dielectric loss (<10−3) must be developed to reduce SAW propagation losses which prevent the piezoelectric ceramics from being used in higher frequency (≳100 MHz) SAW applications. Based on these requirements, fine grained (∼0.5 mgr;m) specimens are fabricated. The propagation losses obtained from these specimens, 9 dB/cm at 100 MHz, are the lowest values ever reported for piezoelectric ceramics. This result suggests that the present ceramics have high potential as materials for high‐frequency SAW devices.
机译:以钛酸铅(PbTiO3)陶瓷为研究对象,研究了压电陶瓷的表面声波(SAW)传播损耗机理,该陶瓷的表面声波(SnTiO3)陶瓷具有零的SAW延迟时间温度系数。频率范围为30至300 MHz的传播损耗由两部分组成。一种是晶粒引起的瑞利散射损耗L,另一种是内耗引起的真耗散损耗LF。因此,总损耗结果为L(dB/cm) =LS+LF= 3.2×103D3f4+6.8×10−4f2(其中Dandf分别表示平均晶粒尺寸(cm)和频率(MHz)。实验还表明,导致后者损耗的内摩擦与压电结合产生的介电损耗密切相关。因此,必须开发具有细晶粒(<0.5 &mgr;m)和低介电损耗(<10−3)的材料,以降低SAW传播损耗,从而阻止压电陶瓷用于更高频率(≳100 MHz)的SAW应用。基于这些要求,制造了细晶粒(∼0.5 &mgr;m)试样。从这些样品中获得的传播损耗为100 MHz时为9 dB/cm,是压电陶瓷有史以来的最低值。该结果表明,该陶瓷作为高频SAW器件的材料具有很高的潜力。

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