Opticalhyphen;emissionhyphen;spectroscopic studies of the sputtering of Yhyphen;Bahyphen;Cuhyphen;oxide thin films

摘要

Optical emission spectroscopy is used to determine the identity of species ejected during sputtering of a composite Yhyphen;Bahyphen;Cuhyphen;oxide target. In this experiment, Y, Ba, Cu, Ba+, and YO were detected near the surface of the target, indicating that oxygen is transported to the substrate during sputtering. Varying of the sputter ion energy caused some variation in relative peak heights, but changing the gas mixture in the system did not significantly alter the spectra.