机译:使用横截面扫描力显微镜表征Al_(x)Ga_(1-x)As/GaAs异质结双极晶体管结构
Department of Electrical and Computer Engineering and Graduate Program in Materials Science, University of California San Diego, La Jolla, California 92093-0407;
Rockwell International Science Center, 1049 Camino Dos Rios, Thousand Oaks, California 91358;