A comparison of surface analysis using ion scattering, ionhyphen;produced photons, and secondary ion emission

摘要

ISS, SIMS (recoil target ions), and ionhyphen;produced photon emission (IPP) from surfaces subject to lowhyphen;energy ion bombardment have been compared by simultaneous measurement of the effect of reactive gas adsorption on each signal. A direct correlation between the three signal strengths has been established. Cross sections for desorption of CO from Ni due to lowhyphen;energy ion bombardment have been measured independently and simultaneously by two of the three methods.