Reduced Cu‐Cr mixing and reduced Pt‐Cu interdiffusion by oxygen in Cu/Cr and Pt/Cu/Cr thin films

摘要

The effects of oxygen on the Cu‐Cr mixing and Pt‐Cu interdiffusion have been studied using Cu/Cr and Pt/Cu/Cr thin film structures. Both processes are reduced by oxygen, in agreement with the predicted effects of oxygen by the surface potential model. The Pt‐Cu interactions provide another example of competing ambient effects dominated by the more electronegative species Pt.