Infrared absorption analysis of films deposited by glowhyphen;discharge of silane/helium mixtures

摘要

Using infrared (IR) absorption measurements, it is proposed that amorphous hydrogenated silicon films obtained from plasmahyphen;enhanced chemical vapor deposition of Silane (SiH4) highly diluted in helium at high rfhyphen;power densities, consist of an amorphous tissue in which a columnar microstructure is embedded. The evolution of the IR spectrum with dilution evidences a remarkable tendency to the substitution of monohydrides by dihydrides. The films show high transparency and good conductivity. These properties make them suitable to be used as window layers for thinhyphen;film solar cells when conveniently doped.