We have investigated the decay of reflection high-energy electron diffraction oscillations during growth of InAs (001), as a function of growth parameters, such as the V/III ratio. We have shown that the decay constants are sensitive to changes in growth morphology, as measured by scanning tunneling microscopy. Our experiments show that the values of these decay constants decrease at high V/III ratios, in agreement with previous work. Additionally, we have found that the values of the decay constants diverge as the transition between the (2×4) and (4×2) reconstructions is approached. We propose that the decay constants of the growth oscillations may be used as inputs for control of interface morphology.
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