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Experimental observation of particle entrapment and transport in an intense ion beam

机译:强离子束中粒子捕获和传输的实验观察

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An experiment is described in which 1.5‐ to 3.0‐mgr;m‐diam gold spheres are injected into the central region of a nearly square 27.4‐keV, 9‐mA argon ion beam with a cross‐sectional area of approximately 3.3 cm2, and the results compared to theory. In the experiment, silicon wafers located 30 and 50 cm from the point of introduction served as targets to collect the particles. After injection, large numbers of gold‐filled craters were found throughout and surrounding the central implant region on the wafers. Gravity and axial momentum transfer acting alone generate trajectories that would place all the particles well below the horizontal centerline of the implanted area. Consequently, particles landing above the central impact region can only be explained by the presence of an electrostatic confining force. Theoretical calculations based on an electrostatic trapping model predict particle distributions on the target that are in remarkable agreement with our experimental results. Thus, these observations provide conclusive evidence in support of beam particle entrapment and transport, phenomena that have heretofore remained unconfirmed.
机译:将1.5&连字符至3.0&连字符;&mgr;m直径的金球注入近方形的27.4‐keV,9‐mA氩离子束的中心区域,横截面积约为3.3 cm2,结果与理论进行了比较。在实验中,距离引入点 30 厘米和 50 厘米的硅晶圆作为收集颗粒的目标。注射后,在晶圆的中央植入区域及其周围发现了大量充满金的陨石坑。重力和轴向动量传递单独作用会产生轨迹,将所有粒子放置在植入区域的水平中心线以下。因此,落在中心撞击区域上方的粒子只能通过静电约束力的存在来解释。基于静电捕获模型的理论计算预测了目标上的颗粒分布,这与我们的实验结果非常吻合。因此,这些观测结果为支持光束粒子捕获和传输提供了确凿的证据,这些现象迄今仍未得到证实。

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