We present a new moving-iron electromagnetic actuator utilizing a single driving coil, a twisting axis as high-stiffness spring, and laminated permalloy material. We analyze its static and dynamic characteristics using the finite-element method, and then we present measurements of the real hysteresis loop and frequency response of the actuator based on a flash charge-coupled device (CCD) laser microangular displacement sensor. The results show that the actuator has angular displacement of $pm$ 0.0064 rad, low hysteresis of less than 5, and amplitude frequency response ($-$3 dB) of 4.3 kHz. We have tested the actuator successfully in a gravure system.
展开▼