Laserhyphen;assisted chemicalhyphen;vapor deposition (LCVD) is used for growth in lsquo;lsquo;free spacersquo;rsquo; of microscale fibers and helical structures of silicon. The LCVD technique is also used for fabrication of a tungsten coil on a cylindrical silicon substrate, i.e., a microsolenoid is realized. The microstructure of the silicon deposits is investigated by transmission electron microscopy, and their mechanical strength is evaluated by micromechanical testinginsituin a scanning electron microscope. The resistivity of the tungsten coil is measured, and the magnetic properties of the microsolenoid are investigated by means of superconducting quantum interference device equipment.
展开▼
