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Non‐Newtonian flow effects during spin coating large‐area optical coatings with colloidal suspensions

机译:非连字符;大面积胶体悬浮液旋涂光学镀膜过程中的牛顿流动效应

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摘要

Multilayer sol‐gel optical high reflectors with greater than 99 reflection have been prepared on substrates up to 20 cm in diameter by spin coating silica/alumina colloidal suspensions. These coatings are radially nonuniform, owing to the extensive shear‐thinning rheology of the high‐index alumina suspension. To a large degree the film thickness nonuniformity can be compensated for by the reflection bandwidth. The rheological properties of the alumina suspension under steady shear have been measured. The low‐shear reduced viscosity and the shear‐thinning time constant are shown to vary exponentially with fgr;2, where fgr; is the solids volume fraction. At fgr;=0.1 the sol has effectively gelled. A model for spincoating with a non‐Newtonian fluid has been developed that uses the Carreau rheology model to fit the measured viscometric data. Modeling and experimental results show that as long as these non‐Newtonian effects are sufficiently large (as in this case) the radial film uniformity is determined only by these parameters and cannot be significantly influenced by spin rate, initial solids fraction, or any other parameters under the control of the operator. However, most of the film thickness variation occurs in the first 1–2 cm from the substrate center, leaving the remainder almost uniform. Therefore the degree of nonuniformity does not appreciably increase with increasing substrate size.
机译:通过旋涂二氧化硅/氧化铝胶体悬浮液,在直径达20 cm的基板上制备了反射率大于99%的多层溶胶&连字符;凝胶光学高反射器。这些涂层是径向不均匀的,这是由于高连字符的氧化铝悬浮液具有广泛的剪切力和变薄流变性。在很大程度上,膜厚的不均匀性可以通过反射带宽来补偿。测量了氧化铝悬浮液在稳剪切作用下的流变性能。低&连字符;剪切降低粘度和剪切&连字符稀化时间常数随 &fgr;2 呈指数变化,其中 &fgr; 是固体体积分数。在&fgr;=0.1时,溶胶已有效凝胶化。已经开发了一种使用非连字符牛顿流体进行旋涂的模型,该模型使用 Carreau 流变学模型来拟合测量的粘度数据。建模和实验结果表明,只要这些非连字符牛顿效应足够大(如本例),径向薄膜均匀性仅由这些参数决定,而不受自旋速率、初始固体分数或操作员控制的任何其他参数的显着影响。然而,大部分薄膜厚度变化发生在距基材中心的前 1-2 厘米处,其余部分几乎均匀。因此,不均匀性程度不会随着基材尺寸的增加而明显增加。

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  • 来源
    《journal of applied physics》 |1992年第2期|972-979|共页
  • 作者单位
  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 英语
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