Scanning force microscopy has been used to perform a comparative nanoscale study of domain structures and switching behavior of Pb(ZrxTi1minus;x)O3(PZT) thin films integrated into heterostructures with different electrodes. The study revealed a significant difference between polarization state of ashyphen;deposited PZT films on RuO2and Pt electrodes. The PZT/RuO2films exhibit polydomain crystallites and show almost symmetric switching behavior, while the PZT/Pt films are mainly in a single polarity state and exhibit highly asymmetric piezoelectric hysteresis loops. Formation of unswitchable polarization within the grains of submicron size as a result of fatigue process was directly observed. copy;1996 American Institute of Physics.
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