A new method is proposed to determine the photoionization threshold energy of a deep level from the dependence of photocapacitance on the scanning rate of light wavelengths. The validity is demonstrated by applying this method to minority carrier traps in annhyphen;type GaAs and aphyphen;type GaP. It is shown that Lucovsky's model of photoionization cross section is valid at least in photon energies less than 1.5 times the threshold energy.
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