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机译:Mapping acid-catalyzed deprotection in thin polymer films: Fluorescence imaging using prefluorescent 7-hydroxycoumarin probes
Univ Ottawa, Dept Chem, Ottawa, ON K1N 6N5, Canada;
lithography; photochemistry; photoresists; CHEMICALLY AMPLIFIED RESISTS; COUMARINS; DIFFUSION; LIPASE; STATE; COLOR;