Generation of 100-GHz millimeter-waves with a monolithically integrated photonic emitter

摘要

We have developed two types of monolithic photonic emitters that operate at a frequency of over 100 GHz. The first emitter employs a high-directivity Yagi-Uda antenna, and it can be fabricated by a conventional PD process. The second one uses patch antenna which is made by a newly developed 3-D IC process. Both emitters employ back-illuminated UTC-PDs, and can be made without complicated fabrication process. We experimentally showed that the measured output power of the emitters was > 200μW.