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Thermal properties of thin insulating layers using pulse transient hot strip measurements

机译:使用脉冲瞬态热轧带钢测量的薄绝缘层的热性能

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摘要

A transient method for measuring thermal conductivity and thermal diffusivity has been developed for studies of insulating solid surface layers with thicknesses down to a few micrometers. The method is based on a procedure by which a string of square pulses, via an ac‐coupled circuit, is applied to the hot strip (deposited thin film), which is acting both as a heat source and a sensor of the temperature increase of the substrate. By performing transient experiments over short times (selecting a short pulse duration), it is possible to limit the depth under the hot strip beyond which the thermal properties of the substrate does not influence the recorded thermal properties. A series of experiment with probing depths ranging from 4 to 10 mgr;m has shown that the thermal properties measured with this technique agree very well with independently measured values provided the pulse duration is small compared to the pulse period. Because of the small probing depth and the size of the thermal probe this novel technique should open up possibilities for studying thermal properties of evaporated and sputtered layers of insulators, a kind of solids which up to now has not been accessable for direct measurements of thermal properties.
机译:已经开发了一种测量热导率和热扩散率的瞬态方法,用于研究厚度低至几微米的绝缘固体表面层。该方法基于一个程序,通过交流耦合电路将一串方形脉冲施加到热带(沉积的薄膜)上,热带既充当热源,又充当基板温升的传感器。通过在短时间内进行瞬态实验(选择较短的脉冲持续时间),可以限制热带钢下的深度,超过该深度,基板的热性能不会影响记录的热性能。探测深度范围为4至10 &mgr;m的一系列实验表明,如果脉冲持续时间与脉冲周期相比较小,则使用该技术测量的热特性与独立测量值非常吻合。由于探测深度小,热探头的尺寸小,这种新技术应该为研究绝缘体的蒸发和溅射层的热特性开辟可能性,这种固体迄今为止还不能用于直接测量热特性。

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