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Disappearance of topographical contrast in the backscattered electron image in scanning electron microscopy

机译:Disappearance of topographical contrast in the backscattered electron image in scanning electron microscopy

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摘要

A computer analysis of the topographical contrast due to surface projection in the backscattered electron image in the scanning electron microscope is described. Present results show that disappearance of the topographical contrast may occur at a certain condition between the incident beam angle and the detector takehyphen;off angle. This condition just corresponds to the experimental results previously reported.

著录项

  • 来源
    《applied physics letters》 |1983年第6期|533-534|共页
  • 作者

    T. Ikuta;

  • 作者单位
  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 英语
  • 中图分类
  • 关键词

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