Calculation of polarization and mobile charge density in ferroelectric films on Si using TVS (triangular voltage sweep) method

摘要

The detection technique both the polarization and the mobile charge density at the same time in ferroelectric films on Si using TVS method have been proposed. This TVS method yield a polarizable and an ionic displacement current peaks whose areas are proportional to the total polarization reversal charge and the total mobile ionic space charge, respectively. The calculated polarization and the mobile charge density TVS measured at 250℃ were 0.42 μC/cm{sup}2 and 5.5×10{sup}11 mobile ions/cm{sup}2 in the SBT film of MFIS structure, and 1.4 μC/cm{sup}2 in the LiNbO{sub}3 film of MFS structure, respectively.