We report on YBa2Cu3O7minus;dgr;thinhyphen;film preparation by a new laser deposition geometry, the sohyphen;called offhyphen;axis laser deposition. Combined with radiationhyphen;based substrate heating, this results inchyphen;axis oriented, epitaxial YBa2Cu3O7minus;dgr;thin films with critical current densities above 106A/cm2at 77 K and zero field and an exceptionally good surface quality, with complete absence of the otherwise observed laser droplets. As proved by atomic force microscopy, the surface roughness is 80 Aring; over an area of at least 10times;10 mgr;m2. Using this offhyphen;axis geometry it is possible to coat both sides of a substrate simultaneously, providing a onehyphen;step process in doublehyphen;sided thinhyphen;film deposition. Both YBa2Cu3O7minus;dgr;films on the substrate show identical superconducting properties.
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