We have proposed I{sub}(DDQ) testing deep submicron(DSM) devices on exploiting the regularity of defect-free I{sub}(DDQ) signatures. This paper demonstrates: (1) A new methodology based on eigen-signatures; (2) The fundamental characteristics of the regularity; (3) The I{sub}(DDQ) values related to a test vector set have a small variation, whereas, the I{sub}(DDQ) magnitudes have a large variation.
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