An electro-optic microprobe for internal-node waveform measurement of GHz LSI's

摘要

This paper describes an electro-optic (EO) microprobe for measuring internal-node waveform of GHz LSI's. The system has spatial resolution of less than 2 μm and bandwidth of 4.5 GHz. The probe can measure GHz signal on sub-micron line by testing-pad with FIB technology. The probe has been successfully applied to waveform measurement of a GHz communication LSI.