Multilayer polycrystalline Er, Sc, or V layers, 500ndash;20 000 Aring; thick, on Kovar or sapphire substrates were studied using 2hyphen;MeV Heplus;ion backscattering. Underlying, as well as surface layer, average thicknesses were measured with a sensitivity of 200 Aring;. In addition, results were obtained on interfacial diffusion, film thickness variations, and the depth distribution of heavy impurities.
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