Deposition of new piezoelectric Ta2O5thin films and their surface acoustichyphen;wave properties

摘要

A new technique for the deposition of the crystallized Ta2O5thin films is described. Crystallized Ta2O5thin films have been deposited on fused quartz substrates by reactive dchyphen;diode sputtering. Crystalline structure and piezoelectric properties of the Ta2O5thin film were investigated. Surface acoustichyphen;wave properties, including a phase velocity, coupling coefficient, temperature coefficient of delay, and propagation loss, were measured.