Highhyphen;frequency performance of InGaAs metalhyphen;semiconductorhyphen;metal photodetectors at 1.55 and 1.3 mgr;m wavelengths

摘要

The highhyphen;speed performance of InGaAs interdigitated metalhyphen;semiconductorhyphen;metal (Mhyphen;Shyphen;M) photodetectors illuminated with 1.55 and 1.3 mgr;m wavelength radiation is modeled using a twohyphen;dimensional transit time calculation. Excellent agreement is found with the experimental pulse response of detectors with interdigital spacings of 2 and 3 mgr;m. We study the dependence of the bandwidth on the device dimensions, and also examine the quantum efficiency. The results should aid the design of InGaAs Mhyphen;Shyphen;M detectors with the optimum combination of bandwidth and efficiency for a given application.