Isotope enrichment in sputter deposits

摘要

The isotope ratio in metal deposits obtained by sputtering a flat target at low ion energy (100 eV) under normal ion incidence is a function of the ejection angle. The lighter isotope (s) are enriched in the direction normal to the target surface as result of rsquo;rsquo;reflective collisionsrsquo;rsquo; which occur when an atom collides with one of heavier mass underneath. Experimental results are presented for Cu(63hyphen;65) and the seven Mo isotopes.