The temporal population profiles of Fast;, CF, and CF2in a sharphyphen;edged, pulsed (500 mgr;s), fluorocarbon discharge are examined. Fast; population rises and falls with the discharge current suggesting that electron impact of the parent fluorocarbon is the primary source of emitting fluorine atoms. Groundhyphen;state CF and CF2, monitored by laserhyphen;induced fluorescence, show noticeably slower formation and decay, but a simple kinetic model assuming that each arises from direct electron impact of the parent gas fits the data. It is shown that CF can be conveniently monitored by exciting theBtilde;(vrsquo;=2)minus;Xtilde;(vlsquo;=0) transition with a 193 nm ArF excimer laser.
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