Manganese oxide films have been focused for the positive electrode in the Li secondary batteries. One of the problems is the oxidation of Mn evaporant during the reactive evaporation process. The Mn evaporant is covered with SUS cell which successfully keeps off the oxidation of evaporant. It was shown that the growth rate of about 15 A/s at the beginning of first deposition run crucial to prepare Mn{sub}3O{sub}4 films of spinel structure. The dependence of SUS cell length on the film properties were investigated. h was found that the SUS cell length of 20 to 30 mm gave excellent results.
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