Laser-to-fiber alignment using MEMS technologies

摘要

We report a new optical beam alignment concept between a laser and an optical fiber. An integrated MEMS (micro-electro-mechanical systems) platform, which has a thermally-actuated micromirror, 3-D solder self-assembly structures and a silicon etched v-groove, is successfully fabricated and actuated for beam adjustment from a VCSEL (vertical-cavity surface-emitting laser) to a fiber. The alignment system has 4.0 degree maximum beam steering angle with the resolution of 0.08 degree/mA. With the steering angle reaching 2.5 degrees, the coupling efficiency improves to 80 from 9 initial efficiency.