Design optimization of high-precision aerostatic equipment based on orifice restriction

摘要

The aerostatic lubrication model with orifice restriction is built based on finite difference method. The model is solved by combination of flux-error feedback and optimization of grids parameter. The stiffness of aerostatic bearing can be improved by reducing the diameter of the orifice, but the optimum working gas gap is reduced and the processing difficulty of surface throttle is improved. The experiments of load and stiffness are carried out on the slider (50 x 50 mm) with the diameter of orifice at 50 mu m. The experimental results and theoretical calculation are in good agreement; thus, the model is verified. The structural parameter of two, three, and four orifice gas-bearings is optimized, respectively, based on the proposed model, and the optimum positions of the orifices are obtained. According to the results, the aerostatic bearing guideways, made up of optical material (K9), are manufactured by some optical ways, and the lubrication of the small gas gap is guaranteed; meanwhile, the straightness accuracy of the aerostatic bearing guideways is 0.1 mu m/200 mm. The analysis result verifies that the calculation method and the aerostatic lubrication model are significant to the design of high-precision aerostatic equipment.