A unique and novel process for thin film synthesis, which is called Quantum Dot Physical Deposition (QDPD) process, was applied to the production of a thin film consisting of metal-organic multi-layer. The thin film formed with two layers of silver and organic material was fabricated on a silicon substrate. The organic monolayer was prepared with the LB method. After making organic layer on the silicon substrate by the accumulation of the LB monolayer, the silver layer was covered on the LB layers by the direct deposition of silver nano-particles with the QDPD process. Clear multi-layer was observed with FIB, and any damages of LB monolayer were not found. The validity of QDPD process was proven for the production of such a thin film consisting of hybrid materials.
展开▼
