FDTD analysis of wire antenna used for large area plasma production

摘要

In order to obtain large area of amorphous Silicon deposition used for LCD and solar cells, FDTD (Finite Difference Time Domain) analysis of folded monopole antenna and the array antenna in plasma is performed. Plasma parameters such as the plasma frequency, collision frequency and the thickness of ion sheath surrounding antenna conductor are estimated by comparing the calculated input impedance of the folded monopole antenna with experimental results. It is noted that the effect of the ion sheath is important to obtain accurate numerical results. The electric field distribution produced by the electric field distribution produced by the folded monopole array antenna is also calculated and compared with the distribution of the deposition rate, showing that the electric field distribution agree qualitatively with deposition rate. It is concluded that the co-phase feeding can not yield uniform distribution of electric and deposition rate, whereas the phase-controlled feeding can make uniform distribution.