Study of Formation Conditions and Characteristics of Carbon-containing Particles Produced from ortho-Xylene by Aerosol-Assisted Chemical Vapor Deposition

摘要

Some fundamental aspects of the aerosol-assisted chemical vapor deposition of carbon-containing nanoparticles from an aerosol of ortho-xylene are described, including the influence exerted by the pyrolysis temperature and flow rate of the carrier-gas on the size characteristics, structure, and composition of the products being formed. It was shown that the shape, size, and structure of particles are determined by processes occurring in the pyrolysis zone, and its temperature is the most important technological parameter, together with the residence time in the reaction zone of products formed in the decomposition of ortho-xylene. The results obtained are of practical importance and form a basis for development of technology and equipment for producing carboncontaining nanoparticles from an aerosol of ortho-xylene.