Serious trade-offs challenge process integration

摘要

This is the second installment of Solid State Technology's review of the Semiconductor Industry Association's (SIA) 1997 National Technology Roadmap for Semiconductors (NTRS). Senior Technical Editor Ed Korczynski authors the first article here,on PIDS, but the rest are written by the Roadmap's working group co-chairs for Interconnects, Factory Integration, and Metrology